|
|
|
Class10
Cleanroom Applications
|
ITEM |
|
Particles Biaxial Shake Test
(Particles > 0.5 um)
(x 103 /cm2 ) |
|
LJ6001 |
0.36 |
18 |
|
LJ-6002 |
0.41 |
16 |
|
LJ3005 |
1.6 |
9 |
|
LJ3005A |
0.72 |
8 |
|
LJ501 |
0.76 |
10 |
|
LJ502 |
0.70 |
10 |
|
LJ503 |
0.66 |
12 |
Class100
Cleanroom Applications
|
ITEM |
|
Particles Biaxial Shake Test
(Particles > 0.5 um)
(x
103/cm2 ) |
|
LJ6001 |
1.9 |
25 |
|
LJ-6002 |
1.3 |
22 |
|
LJ3005 |
4.2 |
15 |
|
LJ3005A |
2.5 |
12 |
|
LJ501 |
1.8 |
18 |
|
LJ502 |
1.6 |
18 |
|
LJ503 |
1.65 |
20 |
Dry Particle Counter
|
|
|
|
|
